SCOUT tutorial 1

- 3 -

- A -

	Step 3: Define the simulated spectra
	Step 3: Reflectance spectrum and comparison to measured data

angles of incidence

angular dependence

automatic fit

	Step 4: Fitting parameters
	Step 3: Reflectance spectrum and comparison to measured data

Autoscale

average

- B -

background susceptibility

backside

	Step 2: Define the layer stack
	The problem

- C -

carrier concentration

	Background
	Results

charge

charge carriers

	The problem
	Background
	Step 1: Define optical constants

chemical symbols

coherent

concentration

	The problem
	Background

conductivity

configuration

	Step 1: Define optical constants
	Step 1: Making use of previous work

configuration file

constant

- D -

damping constant

	Background
	Step 4: Fitting parameters
	Step 3: Parameter adjustment

data points

database

	The problem
	Step 1: Importing optical constants from the database

dielectric background

dielectric function

	The problem
	Step 2: Extensions
	Step 1: Importing optical constants from the database

dielectric function list

Dielectric function model

dielectric function parameters

	The problem
	Background

drag

	Step 4: Fitting parameters
	Step 2: Extensions
	Step 1: Importing optical constants from the database

drag&drop

Drude model

	The problem
	Background
	Step 2: Extensions

- E -

	The problem
	Background

epilayer thickness

Excel 97

	The task
	The table

experimental data

	Step 3: Define the simulated spectra
	Step 4: Fitting parameters

- F -

file format

	Step 3: Define the simulated spectra
	Step 1: Making use of previous work

	The problem
	Step 1: Define optical constants

- G -

Glass

	The problem
	Step 1: Importing optical constants from the database

- H -

- I -

	Step 3: Define the simulated spectra
	Step 3: Reflectance spectrum and comparison to measured data

	Step 2: Define the layer stack
	Background
	Step 3: Reflectance spectrum and comparison to measured data

interference

interference envelope

interference fringes

interference pattern

interference patterns

- L -

	Step 2: Define the layer stack
	Step 2: Extensions
	Step 2: Definition of the layer stack

layer structure

layer thickness

list of dielectric functions

	Step 2: Extensions
	Step 1: Importing optical constants from the database
	Step 2: Definition of the layer stack

list of fit parameters

	Step 4: Fitting parameters
	Step 3: Parameter adjustment

list of optical constants

list of simulated spectra

- M -

	The problem
	Background

mouse button

	Step 2: Define the layer stack
	Step 1: Importing optical constants from the database

multiphonon

- O -

OLE automation

optical constants

	Step 1: Define optical constants
	The problem
	Step 1: Importing optical constants from the database

optical contrast

optimization

	Step 4: Fitting parameters
	Step 3: Parameter adjustment

Overview

- P -

Parameter adjustment

parameter optimization

parameters of the computed spectra

	Background
	Step 4: Fitting parameters
	Step 3: Parameter adjustment

polarization

program configuration

- R -

Range

	Step 1: Define optical constants
	Step 3: Define the simulated spectra
	Step 3: Reflectance spectrum and comparison to measured data

	Step 3: Define the simulated spectra
	Background
	The problem
	Step 3: Reflectance spectrum and comparison to measured data

Report

resistivity

	The problem
	Background
	Results

- S -

	The problem
	Background

semiconductors

silicon

	Background
	Step 1: Define optical constants

silver

	The problem
	Step 1: Importing optical constants from the database

simple layer

	Step 2: Extensions
	Step 2: Definition of the layer stack

	Step 1: Define optical constants
	Step 3: Define the simulated spectra

	The problem
	Sputtering rate

superposition

	Background
	Step 3: Reflectance spectrum and comparison to measured data

susceptibilities

susceptibility

susceptibility list

	Step 1: Define optical constants
	Step 2: Extensions

- T -

	The problem
	Background
	The problem
	Step 2: Definition of the layer stack

thickness variation

thickness vs. time relation

- U -

- V -

- W -