Overview

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Overview

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SCOUT allows the computation of various space and time distributions, e.g. of the electric field amplitudes or the local absorption in layer stacks. Objects performing such kind of computations are collected in the list called 'Distributions'. You can open this list by a right-click in the treeview of SCOUT.

 

The list of distributions also provides objects for computing optical monitoring charts. This feature is not contained in the standard SCOUT program but must be purchased separately.

 

At present the following quantities are implemented:

 

Spatial distribution of the electric field amplitude

 

Spatial distribution of the absorption of light

 

Optical deposition control of layer growth: R vs. total thickness

 

Optical deposition control of layer growth: R vs. time

 

COME: Charts for optical monitoring of etching processes