Overview
About this document
About Tutorial 1
Example 1: Carrier concentration from IR reflectance
The problem
Background
SCOUT work
Overview
Step 1: Define optical constants
Step 2: Define the layer stack
Step 3: Define the simulated spectra
Step 4: Fitting parameters
Results
Example 2: Epilayer thickness from IR reflectance
The problem
Background
SCOUT work
Step 1: Making use of previous work
Step 2: Extensions
Step 3: Parameter adjustment
Exercise
Example 3: Silver layer on glass, thickness determination
The problem
SCOUT work
Step 1: Importing optical constants from the database
Step 2: Definition of the layer stack
Step 3: Reflectance spectrum and comparison to measured data
Sputtering rate
Example 4: Remote control by OLE automation
The task
The table
The macros
A sample session